The following cleanroom Standard is now effective:
Cleanrooms and associated Controlled Environments – Part 15: Assessment of suitability for use of equipment and materials by airborne chemical concentration (ISO 14644- 15:2017)
The scope of the standard is:
“This document provides requirements and guidelines for assessing the chemical airborne cleanliness of equipment and materials which are foreseen to be used in cleanrooms and associated controlled environments which are linked to the ISO standard for cleanliness classes by chemical concentration (see ISO 14644-8).”
The document is available form national standards bodies.
Posted by Dr. Tim Sandle